Semiconductor industry

Project: Ultra-bright plasma lighting prototype

Development targets Prototyping of an ultra-bright plasma lighting system with a spectral range of 180-850 nm Verification of reached intensity and spectral and spectral width Tasks Development of optomechanical components for the laser pump-optic including...

Project Ultra-fast macro-inspection module for touchless control of wafers (200 mm or 300 mm) in the semiconductor industry

Development targets Detection of a variety of defects near the speed of the manufacturing process High sensitivity of up to 0.5 µm at high throughput of 120 Wph High solidity and low Cost of Ownership through “no moving parts”-design Tasks Concept development...

Project: Optimization of alignment and measuring devices for assembling and testing of optical components in the range of 193 nm

Development targets Modification of an engineering tool to a production tool Shortening of scanning and alignment times Ergonomic and qualitative improvements Instantaneous digitalization of measurement results Tasks Analysis of ongoing assembly and alignment...

Project: Ultra-bright plasma lighting prototype

Project Ultra-fast macro-inspection module for touchless control of wafers (200 mm or 300 mm) in the semiconductor industry

Project: Optimization of alignment and measuring devices for assembling and testing of optical components in the range of 193 nm

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